Project SESAM (2009-2012)

"Smart multi-source Energy Scavenger for Autonomous Microsystems"

 

Grant : ANR- 08-SEGI-019

Objectives

Elaboration of an energy harvesting system able to power multiple loads and dealing with various energy sources:

• Design of a dedicated IC for optimal power management,
• Association of  two types of transduction (piezoelectric and electrostatic) for the vibration energy harvester (VEH),
• Other energy sources: PV cells and thermoelements "on the shelf".

Results @ ESIEE Paris

We have fabricated a 1*1.1 cm² electrostatic Vibration Energy Harvester (e-VEH) made of 380 µm-thick bulk silicon. The transducer is a gap-closing capacitor varying from 40 pF to 290 pF. Up to 2.2 µW were harvested at atmospheric  for an acceleration of I g at 150 Hz. The device presents a very large half-power bandwith of 30% thanks to the combined non-linear effects of electrostatic spring softening and stoper-induced mechanical spring stiffnening.

Related publications

Journals

• “Electrostatic vibration energy harvester with combined effect of electrical non-linearities and mechanical impact”, P. Basset, D. Galayko, F. Cottone, R. Guillemet, E. Blokhina, F. Marty and T. Bourouina, Journal of Micromechanics and Microengineering, vol. 24, no 3, pp. 035001, 20142014

• "Limit on converted power in resonant electrostatic vibration energy harvesters", E. Blokhina, D. Galayko, P. Harte, P. Basset, and O. Feely, AIP Applied Physics Letters, 101 (17), 173904-173904, 2012

• "Steady-State Oscillations in Electrostatic Vibration Energy Harvesters", E. Blokhina, D. Galayko, P. Basset and O. Feely, IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 60, no 4, pp. 875-884, 2013

• "Limit on converted power in resonant electrostatic vibration energy harvesters", E. Blokhina, D. Galayko, P. Harte, P. Basset, and O. Feely, AIP Applied Physics Letters, 101 (17), 173904-173904, 2012

• "A general analytical tool for the design of Vibration Energy Harvesters (VEH) based on the mechanical impedance concept – application to electrostatic transducers", D. Galayko and P. Basset, IEEE Transactions on Circuits and Systems I: Regular Papers, Volume 58, Issue 2, 2011

• "Design optimization of an out-of-plane gap-closing electrostatic vibration energy harvester (VEH) with a limitation on the output voltage", R. Guillemet, P. Basset, D. Galayko and T. Bourouina, Analog Integrated Circuits and Signal Processing, Vol. 71, Issue 1,   Pages: 39-47, 2012

Conferences

•  “Wideband MEMS electrostatic vibration energy harvesters based on gap-closing interdigited combs with a trapezoidal section”, R. Guilllemet, P. Basset, D. Galayko, F. Cottone, F. Marty and T. Bourouina, Proceeding of the 26th International Conference on Micro Electro Mechanical Systems (MEMS’13), Taipei, Taiwan, 2013

• “Efficient In-Plane Gap-Closing MEMS electrostatic Vibration Energy Harvester”, R. Guillemet, P. Basset, D. Galayko, F. Marty and T. Bourouina, Proceeding of the 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS’12), Atlanta, USA, 2012

• “Bifurcations and Chaos in Electrostatic Vibration Energy Harvesters”, E. Blokhina, D. Galayko, R. Wade, P. Basset and O. Feely, 2012 International Symposium on Circuits and Systems (ISCAS’12), Seoul, Korea, 2012

• "Comprehensive dynamic and stability analysis of electrostatic Vibration Energy Harvester (e-VEH)", D. Galayko, R. Guillemet, A. Dudka, P. Basset, Proceeding of the 16th int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers’11), Beijing, China, 2011

•  "VHDL-AMS modeling of adaptive electrostatic harvester of vibration energy with dual-output DC-DC converter", A. Dudka, D. Galayko and P. Basset, Proceeding of the 2009 IEEE International Behavioral Modeling and Simulation Conference (BMAS'09), San José, USA, 2009

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